A Study of Bisazido(dimethylamino-propyl)gallium as a Precursor for the OMVPE of Gallium Nitride Thin Films in a Cold-Wall Reactor System under Reduced Pressure

Anjana Devi(Leibniz Institute for Solid State and Materials Research), Roland A. Fischer(Technical University of Munich), A. Wohlfart(Ruhr University Bochum), Frank Hipler(Ruhr University Bochum), Harry Becker(Ruhr University Bochum), W. Rogge(Ruhr University Bochum)
Chemical Vapor Deposition
October 1, 2000
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