Ion beam synthesis of buried CoSi2-structures

Tim Vogel(Shanghai Jiao Tong University), H. Röcken(Ruhr University Bochum), Jan Meijer(Leipzig University), S. Kubsky(Ruhr University Bochum), Harry Becker(Ruhr University Bochum), P. Baving(Ruhr University Bochum), Ulf Weidenmüller(Ruhr University Bochum), A. Stephan(Ruhr University Bochum), Ü. Dagkaldiran(Ruhr University Bochum)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
April 1, 2002
10.1016/s0168-583x(01)01070-9
Cited by 6

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