The relentless march of the MOSFET gate oxide thickness to zero

G. Timp(University of Notre Dame), B. E. Weir(AT&T (United States)), H.-J. Gossmann, K.K. Bourdelle, F. Klemens(Brookhaven National Laboratory), J. M. Rosamilia, R. N. Kleiman(McMaster University), David A. Muller(Cornell University), S. Moccio, A. Kornblit, M Green, D. M. Tennant(University of Tennessee at Knoxville), F.H. Baumann, Winston Timp(Johns Hopkins University), J. P. Garno, A. Ghetti, Y Kim, J. Bude, P. J. Silvėrman, T. Boone(Amgen (United States)), T. Sorsch, R. T. Tung(City University of New York)
Microelectronics Reliability
April 1, 2000
Cited by 35


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