Gettering of platinum and silver to cavities formed by hydrogen implantation in silicon

A. Kinomura(Australian National University), M. Petravić(Australian National University), J. Wong‐Leung(Australian National University), J. S. Williams(University of Illinois Urbana-Champaign)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
May 1, 1997
Cited by 21


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