Optics optimization of 10µm resolution used for the smart phone's PCB and ITO lithography

Jinyun Zhou(Guangdong University of Technology), Liang Lei(Guangdong University of Technology), Qinghua Lin(Guangdong University of Technology)
Unknown
October 1, 2011
10.1109/icssem.2011.6081178
Cited by 0

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