Dynamics of pulsed reactive RF discharges in response to thin film deposition

B Sikimić(Ruhr University Bochum), N. Sadeghi(Centre National de la Recherche Scientifique), Ilija Stefanović(Ruhr University Bochum), I. Denysenko(V. N. Karazin Kharkiv National University), J. Winter(Ruhr University Bochum)
Plasma Sources Science and Technology
March 20, 2014
Cited by 17


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