A nanoelectromechanical systems actuator driven and controlled by Q-factor attenuation of ring resonator

Bin Dong(Purdue University West Lafayette), A. Q. Liu(Hong Kong Polytechnic University), Hong Cai(Institute of Microelectronics), Piotr Kropelnicki(Agency for Science, Technology and Research), Geok Ing Ng(University of Michigan), A. B. Randles(Agency for Science, Technology and Research), Min Tang(Chinese Academy of Sciences), Yimin Gu(Rensselaer Polytechnic Institute), J. M. Tsai(Agency for Science, Technology and Research), Zhigang Suo(Harvard University)
Applied Physics Letters
October 28, 2013
Cited by 34


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