A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and Test

Yunda Wang(Guangzhou University), Yung-Cheng Lee(University of Colorado Boulder), Martin M.-H. Lin(Microsemi (Canada)), Victor M. Bright(University of Colorado Boulder), Ray Radebaugh(National Institute of Standards and Technology), Ryan Lewis(University of Colorado Boulder)
Journal of Microelectromechanical Systems
February 12, 2014
Cited by 7


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