SU-8- and PDMS-based hybrid fabrication technology for combination of permanently bonded flexible and rigid features on a single device

Jasbir N. Patel(Simon Fraser University), Byron D. Gates(Simon Fraser University), Nien-chen Wu(Simon Fraser University), Bożena Kamińska(Polish Academy of Sciences), Bonnie L. Gray(Simon Fraser University)
Journal of Micromechanics and Microengineering
May 16, 2013
Cited by 14


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