Study of the spatial resolution of laser thermochemical technology for recording diffraction microstructures
Vadim P. Veiko(ITMO University), M. V. Yarchuk(St Petersburg University), В. И. Корольков(Russian Academy of Sciences), А. Г. Полещук(Russian Academy of Sciences), E. A. Shakhno(ITMO University), А. Р. Саметов(Russian Academy of Sciences)
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