Precision micro-/nano-machining in a scanning electron microscope by run-to-run control based on image feedbacks

Lun‐De Liao(National Health Research Institutes), Jeng‐Sheng Huang(Chung Yuan Christian University), Shaou-Gang Miaou(Chung Yuan Christian University), Yu-Jhu Lin(Chung Yuan Christian University), Chi-Wei Chiu(National Yang Ming Chiao Tung University), Paul C.-P. Chao(National Yang Ming Chiao Tung University), Ming Chang(Zhengzhou University of Science and Technology)
Microelectronic Engineering
January 19, 2009
Cited by 4


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