Low out-gassing organic spin-on hardmask

Shinya Minegishi(JSR (Japan)), Tsutomu Shimokawa(Yokkaichi University), Yoshikazu Yamaguchi(JSR (Japan)), Mark Slezak, Mitsuo Sato(Nagoya University), Keiji Konno(JSR (Japan)), Junichi Takahashi(JSR (Japan)), Naka-atsu Yoshimura(JSR (Japan)), Shigeru Abe(JSR (Japan)), Yosuke Konno(Hokkaido University of Science)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
March 14, 2008
Cited by 1


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