Amorphous oxygen-containing hydrogenated carbon films formed by plasma enhanced chemical vapor deposition

Steven F. Durrant(Universidade de Sorocaba), Mário A. Bica de Moraes(Universidade Estadual de Campinas (UNICAMP)), Nilson Cristino da Cruz(Universidade de Sorocaba), Jorge Cisneros(Universidade Estadual de Campinas (UNICAMP)), Sandra G. Castro(Universidade Estadual de Campinas (UNICAMP))
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
January 1, 1996
Cited by 40


Related Papers