Performance comparison of Pb(Zr0.52Ti0.48)O3-only and Pb(Zr0.52Ti0.48)O3-on-silicon resonators

Hengky Chandrahalim(Cornell University), Madan Dubey(DEVCOM Army Research Laboratory), Jeff Pulskamp(DEVCOM Army Research Laboratory), Roger Kaul(DEVCOM Army Research Laboratory), Daniel Judy(DEVCOM Army Research Laboratory), Sunil A. Bhave(Purdue University West Lafayette), Ronald G. Polcawich(DEVCOM Army Research Laboratory)
Applied Physics Letters
December 8, 2008
Cited by 50


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