High energy implantation masking with polyimide

Risto Mutikainen(University of California, Berkeley), H. N. Wong(University of California, Berkeley), N.W. Cheung(University of California, Berkeley)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
February 1, 1989
10.1016/0168-583x(89)90282-6
Cited by 4

Abstract

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