Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films

Marina Prenzel(Ruhr University Bochum), Achim von Keudell(Ruhr University Bochum), Annika Kortmann(Ruhr University Bochum), Teresa de los Arcos(Ruhr University Bochum), J. Winter(Ruhr University Bochum)
Journal of Applied Physics
November 15, 2012
Cited by 7


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