Epitaxial growth of TiN films by N-implantation into evaporated Ti films

Y. Kasukabe(Tohoku University), S. Yamaguchi(Tohoku University), Yukio Yamada(Musashino Red Cross Hospital), Masashi Kishimoto(Tohoku University), Shigekazu Nagata(The University of Osaka), Masahiro Suzuki(Fujita Health University), Y. Fujino(Tohoku University), Noriko Saito(Kyushu Dental University)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
November 1, 1998
Cited by 11


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