Effect of Scratch Stress on the Surface Hardness and Inner Structures of a Capacitive Fingerprint Sensor LSI
N. Shimoyama(NTT (Japan)), Katsuyuki Machida(NTT (Japan)), Hiroki Morimura(NTT (Japan)), Mahito Nakanishi(Tokiwa University), Teppei Shimamura(Systems Biology Institute), Hiroyuki Ishii(NTT (Japan)), Satoshi Shigematsu(NTT (Japan)), T. Kumazaki(NTT (Japan))
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