Atomic-scale formation of ultrasmooth surfaces on sapphire substrates for high-quality thin-film fabrication

Mamoru Yoshimoto(Tokyo Institute of Technology), Ayaho Miyamoto(Hatch (Canada)), Tatsuro Maeda(Tokyo Institute of Technology), Osamu Ishiyama(Shimadzu (Japan)), Ryuji Miura(Hatch (Canada)), Makoto Shinohara(Shimadzu (Japan)), Momoji Kubo(Tohoku University), Tsuyoshi Ohnishi(Tokyo Institute of Technology), Hideomi Koinuma(Cabinet Office)
Applied Physics Letters
October 30, 1995
Cited by 398


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