ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications
Zhi Yan(Hong Kong Polytechnic University), Yu Wang(Yanshan University), Jinguang Cheng(FZU ‒ Institute of Physics of the Academy of Sciences of the Czech Republic), Xuechang Zhou(Sun Yat-sen University), W. L. Liu(Shanghai Institute of Microsystem and Information Technology), Lee‐Lun Lai(KTH Royal Institute of Technology), Zhitang Song(Chinese Academy of Sciences), Song Feng(Shanghai Institute of Microsystem and Information Technology), G. K. H. Pang(Hong Kong Polytechnic University), J. Z. Chen(East China Normal University), T. Zhang(Shanghai Institute of Microsystem and Information Technology)
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