ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications
Zhi Yan(Hong Kong Polytechnic University), Yu Wang(Yanshan University), Jinguang Cheng(Chinese Academy of Sciences), Xuechang Zhou(Shenzhen University), W. L. Liu(Shanghai Institute of Microsystem and Information Technology), Lee‐Lun Lai(Chinese University of Hong Kong), Zhitang Song(Chinese Academy of Sciences), Song Feng(Shanghai Institute of Microsystem and Information Technology), G. K. H. Pang(Hong Kong Polytechnic University), J. Z. Chen(East China Normal University), T. Zhang(Shanghai Institute of Microsystem and Information Technology)
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