Design and Fabrication of Planar-Type Micro-Hotplate with Si-Island Gas Sensor

Bin Zhu(Nanjing Tech University), Dong Ning(Nanjing Tech University), Chun Min Tao(Nanjing Tech University), Chen Yin(Reitaku University), Zi Li Zhang(Nanjing Tech University)
Advanced materials research
September 1, 2011
Cited by 3


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