Stretchable wavy metal interconnects

Joyelle Jones(Princeton University), Zhigang Suo(Harvard University), Stéphanie P. Lacour(École Polytechnique Fédérale de Lausanne), S. Wagner(Princeton University)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
July 1, 2004
10.1116/1.1756879
Cited by 161

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