Comparison of surface oxidation of titanium nitride and chromium nitride films studied by x-ray absorption and photoelectron spectroscopy

Fumitaka Esaka(Tokyo University of Science), Tadashi Kikuchi(Sanyo-Onoda City University)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
September 1, 1997
10.1116/1.580764
Cited by 245

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