Fabrication and integration of VLSI micro/nano-photonic circuit board

El-Hang Lee(Inha University), S. G. Lee(Inha University), O B.H.(Inha University), S. G. Park(Inha University), Ming‐Yi Chung(Pusan National University), K. H. Kim(Inha University), Seongjoo Song(Inha University)

Microelectronic Engineering

January 20, 2006

10.1016/j.mee.2005.12.010

Cited by 28

Abstract

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