Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties
Shoushan Fan(Stanford University), Michael G. Chapline(Stanford University), Nathan R. Franklin(Stanford University), Thomas W. Tombler(Stanford University), Alan M. Cassell(Stanford University), Hongjie Dai(Stanford University)
Cited by 2,996
Abstract
The synthesis of massive arrays of monodispersed carbon nanotubes that are self-oriented on patterned porous silicon and plain silicon substrates is reported. The approach involves chemical vapor deposition, catalytic particle size control by substrate design, nanotube positioning by patterning, and nanotube self-assembly for orientation. The mechanisms of nanotube growth and self-orientation are elucidated. The well-ordered nanotubes can be used as electron field emission arrays. Scaling up of the synthesis process should be entirely compatible with the existing semiconductor processes, and should allow the development of nanotube devices integrated into silicon technology.