Formation of submicron buckling patterns in thin metal film on micro-scale substrate by pyrolysis of photoresist

Yang Gao(Institute of Rock and Soil Mechanics), Qi Xia(Huazhong University of Science and Technology), Tielin Shi(Huazhong University of Science and Technology), Zirong Tang(Wuhan National Laboratory for Optoelectronics), Hui Zheng(Huazhong University of Science and Technology)
Thin Solid Films
October 30, 2013
Cited by 7


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