Friction and wear properties in MEMS

Weiyuan Wang(Chinese Academy of Sciences), Yuelin Wang(Chinese Academy of Sciences), Haifei Bao(Shanghai Institute of Microsystem and Information Technology), Bin Xiong(State Key Laboratory of Transducer Technology), Minhang Bao(Fudan University)
Sensors and Actuators A Physical
April 1, 2002
10.1016/s0924-4247(01)00821-4
Cited by 93

Abstract

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