High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

Arutiun P. Ehiasarian(Sheffield Hallam University), J. Winter(Ruhr University Bochum), Ante Hećimović(Ruhr University Bochum), Marc Böke(Ruhr University Bochum), R. New(Sheffield Hallam University), Teresa de los Arcos(Ruhr University Bochum), Volker Schulz-von der Gathen(Ruhr University Bochum)
Applied Physics Letters
March 12, 2012
Cited by 125


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