Nitrogen ion implantation of silicon-containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition

Costas G. Fountzoulas(DEVCOM Army Research Laboratory), J. D. Demaree(DEVCOM Army Research Laboratory), J. K. Hirvonen(DEVCOM Army Research Laboratory), James D. Kleinmeyer(DEVCOM Army Research Laboratory)
Surface and Coatings Technology
May 1, 1998
10.1016/s0257-8972(98)00381-8
Cited by 7

Abstract

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