High‐Pressure Chemical Deposition for Void‐Free Filling of Extreme Aspect Ratio Templates

Neil F. Baril(Pennsylvania State University), John V. Badding(Pennsylvania State University), Venkatraman Gopalan(Pennsylvania State University), Pier J. A. Sazio(University of Southampton), M. Krishnamurthi(Pennsylvania State University), Anna C. Peacock(University of Southampton), Ali Borhan(Pennsylvania State University), I. Temnykh(Pennsylvania State University), Banafsheh Keshavarzi(Pennsylvania State University), Justin R. Sparks(Pennsylvania State University)
Advanced Materials
September 8, 2010
10.1002/adma.201001199
Cited by 27

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