Overlay target design characterization and optimization for tungsten CMP
Stephen D. H. Hsu(Texas Instruments (United States)), Michelle L. Zimmerman(KLA (United States)), Joost J. Vlassak(Harvard University), Cameron Harker(KLA (United States)), Mircea Dusa(Texas Instruments (United States))
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
June 8, 1998
Cited by 6
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