Inspection and repair issues for Step-and-Flash Imprint Lithography templates

Kevin J. Nordquist(Motorola (United States)), David Lee, David Adler, Douglas J. Resnick(The Ohio State University), William J. Dauksher(Motorola (United States)), David P. Mancini(Motorola (United States)), Harald F. Hess(Howard Hughes Medical Institute), Kirk J. Bertsche, Donald W. Pettibone(KLA (United States)), Roy White, Jeffrey E. Csuy
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
December 6, 2004
Cited by 3


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