Development of an electromagnetic micro-generator

Abstract

A design methodology for linear micro-generators is developed, and is applied to the design of a mm scale electromagnetic micro-generator. The fabrication of a prototype device is also described using generally available microfabrication techniques, and the results of testing the device on a variable amplitude vibration source, in air and vacuum, are presented. The experimental results confirm the design rules and indicate how the generation of useful power levels might be achieved.