Gettering of copper to hydrogen-induced cavities in silicon

J. Wong‐Leung(Australian National University), J. S. Williams(University of Illinois Urbana-Champaign), R. G. Elliman(Australian National University), C. Ascheron(Australian National University), M. Petravić(Australian National University)
Applied Physics Letters
March 6, 1995
Cited by 124


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