Chemical and optical profiling of ultra thin high-k dielectrics on silicon

S. Bernardini(University of Manchester), S. Hall(University of Liverpool), Mhairi Mackenzie(Urban Big Data Centre), T.C.Q. Noakes(Daresbury Laboratory), Octavian Buiu(University of Liverpool), W.M. Davey(University of Liverpool), B. Hamilton(University of Manchester), Paul Bailey(Daresbury Laboratory)
Thin Solid Films
August 15, 2008
Cited by 5


Related Papers