Structure, optical and electrical properties of silicon-rich silicon nitride films

V. V. Voskoboynikov(Institute of Semiconductor Physics), F. L. Edelman(Institute of Semiconductor Physics), V. A. Gritsenko(Institute of Semiconductor Physics), V. M. Osadchiı̆(Institute of Semiconductor Physics), Б. Н. Зайцев(V. G. Khlopin Radium Institute), K.P. Mogilnicov(Institute of Semiconductor Physics), N.D. Dikovskaya(Institute of Semiconductor Physics), S. P. Sinitsa(Institute of Semiconductor Physics)
Thin Solid Films
March 1, 1976
Cited by 19


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