Rectifying characteristics of sputter-deposited SiGe diodes

Guo-Ping Ru(Fudan University), Bing-Zong Li(Soochow University), Xin-Ping Qu(Fudan University), Guangwei Wang(Shandong University of Science and Technology), Wei Huang(Fudan University), Shiyang Zhu(Fudan University)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
June 16, 2003
10.1116/1.1580842
Cited by 7

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