Inspection of templates for imprint lithography

Harald F. Hess(Howard Hughes Medical Institute), Douglas J. Resnick(The Ohio State University), David P. Mancini(Motorola (United States)), Don Pettibone, Kirk J. Bertsche, David Adler, Kevin J. Nordquist(Motorola (United States)), William J. Dauksher(Motorola (United States))
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
November 1, 2004
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