MOCVD of ZrO<sub>2</sub> and HfO<sub>2</sub> Thin Films from Modified Monomeric Precursors

U. Patil(Ruhr University Bochum), Anjana Devi(Leibniz Institute for Solid State and Materials Research), Klaus Merz(Ruhr University Bochum), Roland A. Fischer(Technical University of Munich), Reji Thomas(Lovely Professional University), Rainer Waser(X-Fab (Germany)), A.P. Milanov(Ruhr University Bochum), Manuela Winter(Ruhr University Bochum), P. Ehrhart(Forschungszentrum Jülich), R. Becker(Ruhr University Bochum), Harry Becker(Ruhr University Bochum), R. Bhakta(Ruhr University Bochum)
Chemical Vapor Deposition
March 1, 2006
Cited by 18


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