Local Measurements of Diffusion Length and Chemical Character of Metal Clusters in Multicrystalline Silicon

Tonio Buonassisi(Massachusetts Institute of Technology), Eicke R. Weber(University of California System), Zhonghou Cai(Argonne National Laboratory), Barry Lai(Argonne National Laboratory), Steve M. Heald(Argonne National Laboratory), Matthew D. Pickett(Lawrence Berkeley National Laboratory), A. A. Istratov(Lawrence Berkeley National Laboratory), Matthew A. Marcus(Lawrence Berkeley National Laboratory), M. Heuer(Lawrence Berkeley National Laboratory)
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
December 15, 2005
Cited by 28


Related Papers