Molybdenum thin films with low resistivity and superior adhesion deposited by radio-frequency magnetron sputtering at elevated temperature

Xinyi Dai(Guizhou University), Jingze Li(University of Electronic Science and Technology of China), Jin Xu(University of Electronic Science and Technology of China), Lidong Feng(University of Electronic Science and Technology of China), Aijun Zhou(University of Electronic Science and Technology of China), Ying Wang(National Engineering Research Center of Electromagnetic Radiation Control Materials)
Thin Solid Films
August 5, 2014
Cited by 60


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