Analysis of film thickness for magnetron sputtering system with more than one workbench
Tao Wang(North China University of Science and Technology), Hongjun Jing(University of Electronic Science and Technology of China), Yadong Jiang(Fudan University), Zhiming Wu(University of Electronic Science and Technology of China), Jing Jiang(University of Electronic Science and Technology of China), He Yu(University of Electronic Science and Technology of China)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
November 4, 2009
Cited by 3
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