Monitoring of hydrocarbon concentrations in dust-producing RF plasmas

F. Hempel(Leibniz Association), J. Röpcke(Leibniz Association), B Sikimić(Ruhr University Bochum), Ilija Stefanović(Ruhr University Bochum), D. Lopatik(Leibniz Association), J. Winter(Ruhr University Bochum)
Plasma Sources Science and Technology
August 10, 2012
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