Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition

Teresa de los Arcos(Ruhr University Bochum), Anjana Devi(Leibniz Institute for Solid State and Materials Research), Detlef Rogalla(University Hospitals of the Ruhr-University of Bochum), Alexander Birkner(Ruhr University Bochum), Roland A. Fischer(Technical University of Munich), Alfred Ludwig(Ruhr University Bochum), Stefan Cwik(Ruhr University Bochum), Tristan Wagner(Ruhr University Bochum), Vanessa Gwildies(Ruhr University Bochum), Harish Parala(Ruhr University Bochum), J. Winter(Ruhr University Bochum), A.P. Milanov(Ruhr University Bochum)
Thin Solid Films
December 13, 2011
Cited by 11


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