Electrical properties and thermal stability of Ta/TaN/SiCN tri-layer barrier

Liping Yang(Xinjiang Normal University), C. Y. Li(Nanyang Technological University), F. X. Deng(Nanyang Technological University), D. H. Zhang(Nanyang Technological University)
Unknown
July 1, 2010
10.1109/ipfa.2010.5532229
Cited by 1

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