Investigation of niobium nitride and oxy-nitride films grown by MOCVD

Daniela Bekermann(Ruhr University Bochum), Anjana Devi(Leibniz Institute for Solid State and Materials Research), Davide Barreca(National Interuniversity Consortium of Materials Science and Technology), Roland A. Fischer(Technical University of Munich), Harry Becker(Ruhr University Bochum), Alberto Gasparotto(University of Padua)
Surface and Coatings Technology
July 30, 2009
Cited by 23


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