dc dynamic and static pull-in predictions and analysis for electrostatically actuated clamped circular micro-plates based on a continuous model

Lun‐De Liao(National Health Research Institutes), Chi-Wei Chiu(National Yang Ming Chiao Tung University), Paul C.-P. Chao(National Yang Ming Chiao Tung University), Chih‐Wei Huang(National Yang Ming Chiao Tung University)
Journal of Micromechanics and Microengineering
December 18, 2009
10.1088/0960-1317/20/2/025013
Cited by 37

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