Investigation of Ni reaction with sputtered amorphous SiGe thin film on SiO2 substrate

Xin-Ping Qu(Fudan University), Bing-Zong Li(Soochow University), Yanqing Wu(Fudan University), Guo-Ping Ru(Fudan University), Peng Duan(Fudan University), Guangwei Wang(Shandong University of Science and Technology), Tao Chen(Fudan University)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
December 9, 2005
10.1116/1.2126679
Cited by 1

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