Comparison of the microstructure of titanium oxide films deposited on silicon and LTI-carbon

Xianghui Wang(Nankai University), Xianghuai Liu(Chinese Academy of Sciences), Feng Zhang(Shenzhen University), Zhihong Zheng(Chinese Academy of Sciences), Changrong Li(East China Normal University)
Surface and Coatings Technology
March 1, 2001
Cited by 3


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