Investigation of Micro Mechanical Vibration of Piezoelectric Actuators Using a Stroboscopic SEM

Hiroyuki Ishikawa(Fukuoka Dental College), Y. Uchikawa(Bristol-Myers Squibb (Japan)), Hisanobu Dobashi(Nagoya University), Takeshi Furuhashi(Nagoya University), Tetsuji Kodama
Journal of Electron Microscopy
February 1, 1993
Cited by 5


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